Specifications:

Performance:

Analog

Digital

            Linearity  
                                   
            Repeatability & Hysteresis
            Response Time
                 ( to within 1% of set point, Volume Dependant)
            Temperature Coefficient 
                 (Deviation from 21ºC Cal Temp)
            Long Term Stability
                 (7500 hours)

 ± 1.0% of Full Scale
Range Dependant
 ± 0.35% FS
40 msec

 0.06% / ºC

 0.2% FS

 ± 0.4%

 ± 0.35% FS
 150 msec

 0.06% / ºC     Uncompensated
0.005% / ºC   Compensated
 0.2%FS

Fluid Requirements:

             Calibration Gas  (Non-Corrosive)
             Flow Ranges

Customer Specified
Customer Specified
0, 0-500sccm

Customer Specified
Customer Specified
0, 0-750 sccm

             Pressure Range 
             Cal Pressure


             Internal Leakage
             External Leakage

Customer Specified (0, Min to Max)
0 PSI at Vconrol < 1% FS
Min at Vcontrol = 2% FS
Max at Vcontrol = 100% FS
10^-5 sccm @1, 30 and 100 Psi (He)
2 x 10^-6 sccm (He)

Electrical Requirements:

            Input Voltage (single supply)
            Power Consumption
            Control Voltage
            Digital Control
            Output Voltage

12, 15, 18, or 24 volts +10% - 3%
1.5 Watts Maximum
0-5 VDC, 1-5 VDC, 0-10 VDC, 1-10 VDC, or 4-20mA
RS232, Digital Unit only
0-5 VDC, 1-5 VDC, 0-10 VDC, 1-10 VDC

Environmental Requirements:

            Operating Ambient Temp.
            Storage Temperature
            Humidity Range

0-50ºC
-40 - 70ºC
5% - 95% (Relative, non-condensing)
Nominal Temperature 21ºC ± 5ºC

Mechanical Configuration:

            Input/Output Ports
            Dimensions
            Weight

 10-32 Threaded (Other sizes, consult factory)
 L: 2.0” W: 1.5” H: 1.85”
 5.4 oz

Construction (wetted materials):

            Manifold
            O-Rings
            Valve Components
           Pressure Sensor

Nickel Plated Aluminum
Fluorocarbon (Viton®), others at additional cost
Brass 360, AISI 300 series, 430 FR Stainless Steel
Poly Phenelene Sulfide, Glass, Silicon, Gold, Silicone Adhesive