Specifications:

Performance:

Analog

Digital

            Linearity  
                                   
            Repeatability & Hysteresis
            Response Time
                 ( to within 1% of set point)
            Temperature Coefficient 
                 (Deviation from 21ºC Cal Temp)
            Long Term Stability
                 (7500 hours)

       ± 3.0% of Full Scale (Typical)
                  Range Dependant
       ± 0.15% FS
       40 msec

       0.09% / ºC

       0.2% FS

    ± 0.5%

    ± 0.15% FS
    150 msec

  0.09% / ºC     Uncompensated
0.005% / ºC   Compensated
    0.2%FS

Fluid Requirements:

             Calibration Gas  (Non-Corrosive)
             Flow Ranges

                         Customer Specified                                                  Customer Specified
                         Customer Specified                                                  Customer Specified
                              0, 0-500sccm                                                               0, 0-750 sccm

             Pressure Range 
             Cal Pressure
             Internal Leakage
             External Leakage

0-100 Psi
25 Psi
10^-5 sccm @1, 30 and 100 Psi (He)
2 x 10^-6 sccm (He)

Electrical Requirements:

            Input Voltage (single supply)
            Power Consumption
            Control Voltage
            Digital Control
            Output Voltage

12, 15, 18, or 24 volts +10% - 3%
1.5 Watts Maximum
0-5 VDC, 1-5 VDC, or 4-20mA
RS232, Digital only
Customer Specified

Environmental Requirements:

            Operating Ambient Temp.
            Storage Temperature
            Humidity Range

0-50ºC
-40 - 70ºC
5% - 95% (Relative, non-condensing)
Nominal Temperature 21ºC ± 5ºC

Mechanical Configuration:

            Input/Output Ports
            Dimensions
            Weight

 10-32 Threaded (Other sizes, consult factory)
 L: 2.0” W: 1.5” H: 1.85”
 5.4 oz

Construction (wetted materials):

            Manifold
            O-Rings
            Valve Components

            Flow Sensor

Nickel Plated Aluminum
Fluorocarbon (Viton®), others at additional cost
Brass 360, AISI 300 series, 430 FR Stainless Steel

Ceramic Flow Tube (non-out gassing), Silicon, Silicon Nitrite, Gold, Aluminum Oxide Epoxy Sealant, Fluorocarbon (Viton®), Polythermide (100+ sccm MFC only)